Nozzle beam source for vapor deposition

Details Nozzle beam source for vapor deposition Nozzle beam source for vapor deposition

1982-08-11

1983-11-01

Smith, John D.

Coating apparatus

Gas or vapor deposition

Crucible or evaporator structure

219274, C23C 1312

Patent

active

044125089

ABSTRACT:
A nozzle beam source for use in the vapor deposition of electrode materials such as gold, during the fabrication of precision quartz-crystal resonators, or the like. The nozzle beam source includes a graphite crucible and source tube, a tungsten wick within the source tube, and graphite-to-graphite mechanical seals.

REFERENCES:
patent: 2665225 (1954-01-01), Godley
patent: 3514575 (1970-05-01), Hall et al.
patent: 3690638 (1972-09-01), Roblin et al.
patent: 3931493 (1976-01-01), Ferrar
patent: 4125086 (1978-11-01), Vig et al.
Morgan, "Crucible for Aluminum Evaporation," IBM Tech. Disclosure Bulletin, ol. 20, No. 7, Dec. 1977, p. 2844.

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