Novolak containing photoresist stripper composition

Details Novolak containing photoresist stripper composition Novolak containing photoresist stripper composition

1995-05-08

1996-04-16

Therkorn, Linda Skaling

Compositions

Fluent dielectric

N-containing

252153, 252162, 252171, 25217423, 252DIG8, 134 2, 134 38, 430260, 430329, 430331, B08B 700, C09D 900, C11D 344

Patent

active

055079784

ABSTRACT:
A noncorrosive photoresist composition containing:

REFERENCES:
patent: 3582401 (1971-06-01), Berilla et al.
patent: 4015986 (1977-04-01), Paal et al.
patent: 4617251 (1986-10-01), Sizensky et al.
patent: 4770713 (1988-09-01), Ward
patent: 4786578 (1988-11-01), Neisius et al.
patent: 4824762 (1989-04-01), Kobayashi et al.
patent: 4824763 (1989-04-01), Lee
patent: 4904571 (1990-02-01), Miyashita et al.
patent: 5102777 (1992-04-01), Lin et al.
patent: 5145717 (1992-09-01), Drury
patent: 5279791 (1994-01-01), Lee
patent: 5308745 (1994-05-01), Schwartzkopf
patent: 5334332 (1994-08-01), Lee
patent: 5472830 (1995-12-01), Honda

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