Novel stripping composition for positive photoresists and method

Details Novel stripping composition for positive photoresists and method Novel stripping composition for positive photoresists and method

1980-09-15

1981-12-08

Albrecht, Dennis L.

Compositions

Compositions containing a single chemical reactant or plural...

Organic reactant

134 3, 134 38, 134 42, 1566591, 1566611, 156904, 252171, 252549, 252558, 252DIG8, 430315, B08B 308, C09D 900, C09D 904, C23D 1700

Patent

active

043046819

ABSTRACT:
A novel stripping composition and method of using same is disclosed, which stripping composition comprises:

REFERENCES:
patent: 3813309 (1974-05-01), Bakus et al.
patent: 4165294 (1979-08-01), Vandermey
patent: 4165295 (1979-08-01), Vandermey

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