Novel solvent drying agent

Details Novel solvent drying agent Novel solvent drying agent

1978-03-20

1979-10-02

Weinblatt, Mayer

Compositions

Water-softening or purifying or scale-inhibiting agents

252162, 252172, 252364, 252DIG9, 134 30, 134 31, 134 37, 134 38, 260698, C23G 502

Patent

active

041698070

ABSTRACT:
Mixtures of 1-propanol, water and certain perfluoro compounds form excellent drying agents for silicon based devices. The mixtures have good wetting properties and form azeotropic mixtures in the vapor phase.

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