Notched wafer aligning apparatus

Details Notched wafer aligning apparatus Notched wafer aligning apparatus

1997-09-10

1998-12-29

Krizek, Janice L.

Material or article handling

Article reorienting device

Article frictionally engaged and rotated by relatively...

198394, 414936, B65G 4724

Patent

active

058532846

ABSTRACT:
A notched wafer aligning apparatus capable of aligning a number of notched wafers received in a cassette with each other at a predetermined position and facilitating shifting of the thus-aligned wafers to any desired position. A plurality of notch detection rollers are rotatably arranged in juxtaposition to each other on a rotation drive shaft so as to be rotated while being abutted against a lower portion of peripheral edges of the wafers through a lower open end of the cassette. The notch detection rollers are individually rotated due to friction between the notch detection rollers and the rotation drive shaft.

REFERENCES:
patent: 5028200 (1991-07-01), Shimane
patent: 5155888 (1992-10-01), Lau
patent: 5183378 (1993-02-01), Asano et al.
patent: 5533243 (1996-07-01), Asano
patent: 5662452 (1997-09-01), Allison
Recif Inc., "Recif Experience on 8 Projects," brochure, Recif Inc., San Jose, CA; date unknown.
MGI Electronices, "Model #VXM-0495 200 mm Notch Aligner," brochure; date unknown.
Mactronix, "Mactronix, NFM-800 Manual Notch Aligner," leaflet, Japan; date unknown.
Mactronix, "Mactronix, NFA-800 Automatic Notch Aligner," leaflet, Japan; date unknown.

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