Notch position aligning apparatus and process for using the appa

Details Notch position aligning apparatus and process for using the appa Notch position aligning apparatus and process for using the appa

1994-12-28

1996-07-09

Fourson, George

Metal working

Barrier layer or semiconductor device making

437925, 414936, 414938, 414433, 414757, 414786, 269289MR, 269903, B23B 522, B65G 4724

Patent

active

055332439

ABSTRACT:
According to this invention, there is provided a notch position aligning mechanism and a process for using the mechanism including a base which can be vertically movably inserted into a cassette through a lower opening of the cassette for storing a plurality of targets to be aligned having notches formed in edge portions of the targets wherein can be fitted, a rotating/supporting mechanism, including a first rotary member which is arranged on the base, and has a plurality of fitting grooves in which the notches of the targets can be fitted, a second rotary member which can be rotated and is arranged on the base, and a drive unit for rotating at least one of the first and second rotary members, the rotating/supporting mechanism supporting and rotating the targets using the first and second rotary members while the targets are spaced apart from the cassette, and a support member, arranged on the base, for supporting the targets having the notches fitted in the fitting grooves of the first rotary member to stop rotations of the targets.

REFERENCES:
patent: 4570058 (1986-02-01), Hauassy
patent: 4662811 (1987-05-01), Hayden
patent: 4778382 (1988-10-01), Sakashita
patent: 4813840 (1989-03-01), Prabhakar et al.
patent: 4970772 (1990-11-01), Steere, III
patent: 5183378 (1993-02-01), Asano et al.
patent: 5205028 (1993-04-01), Leonard
patent: 5383759 (1995-01-01), Lin

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