Notch finder having a flexible alignment rod

Details Notch finder having a flexible alignment rod Notch finder having a flexible alignment rod

1995-10-11

1996-09-03

Merritt, Karen B.

Material or article handling

Article reorienting device

Article frictionally engaged and rotated by relatively...

198394, 414938, B65G 4724

Patent

active

055518290

ABSTRACT:
An orientation apparatus for aligning indexing notches of disk-shaped members, such as semiconductor wafers, includes a flexible alignment rod that imparts rotation of the disk-shaped members until the indexing notches are registered with the alignment rod. The alignment rod is captured by a displaceable comb member that exposes regions of the rod between adjacent teeth. The teeth ensure that the disk-shaped members are properly aligned. The comb member has a raised operation position in which the disk-shaped members are spaced apart from rollers and has a lowered retracted position in which the weight of the disk-shaped members is transferred to the rollers. A camming mechanism may be used to raise and lower the comb member and alignment rod between the two positions.

REFERENCES:
patent: 3997065 (1976-12-01), Jaksch
patent: 4311427 (1982-01-01), Coad et al.
patent: 4441853 (1984-04-01), Kosugi
patent: 4662811 (1987-05-01), Hayden
patent: 5183378 (1993-02-01), Asano et al.
Semiconductor Wafer Alignment Fixture, IBM Technical Disclosure Bulletin, vol. 10, No. 6, Nov. 1967, pp. 828-829.

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