Normally off schottky barrier field effect transistor and method

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357 23, 29589, H01L 2948, H01L 2956

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active

039464156

ABSTRACT:
A normally-off field effect transistor having the structure of an IGFET with a substantially undoped semiconductor material replacing the insulation between the substrate and the gate metal. A Schottky barrier formed between the gate metal and the substantially undoped semiconductor material produces a channel in the substrate when reverse biased. Method of fabrication is also described.

REFERENCES:
patent: 3263095 (1966-07-01), Fang
patent: 3611067 (1971-10-01), Oberlin
patent: 3665262 (1972-05-01), Yamashita et al.
patent: 3711745 (1973-01-01), Moroney
patent: 3855690 (1974-12-01), Kim

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