Normal force transducer

Details Normal force transducer Normal force transducer

1990-03-21

1991-12-31

Ruehl, Charles A.

Measuring and testing

Dynamometers

Responsive to force

73161, 7386265, G01L 500, G01L 122

Patent

active

050761064

ABSTRACT:
Apparatus for measuring the normal force (F.sub.n) exerted on a pin by a receptacle contact. The normal force measuring transducer (20) has a support beam (34) and a sensing beam (50). Sensing beam (50) has a monocrystalline silicon element (30) and may include beam element (40). Piezoresistive elements (E.sub.1, E.sub.2, E.sub.3 and E.sub.4) are atomically bonded to element (30) using techniques of solid state diffusion. Fine lines (76) of conductive material interconnect the piezoresistive elements to connection pads (GP.sub.1, GP.sub.2, GP.sub.3 and GP.sub.4). The support beam (34) and sensing beam (50) have a deflecting space (70) therebetween and two supports (56,58) therealong. Normal force applied to the beams causes a change in the resistance of the piezoresistive elements indicative of the magnitude of the normal force.

REFERENCES:
patent: 3662234 (1972-05-01), Ishii
patent: 4199980 (1980-04-01), Bowman
patent: 4327350 (1982-04-01), Erichsen
patent: 4380171 (1983-04-01), Smith
patent: 4667512 (1987-05-01), Buddwalk
M. A. Baker, "Semiconductor Strain Gauges", Chapter 6 of Strain Gauge Technology, Jun. 1982, pp. 267-289.
Kulite, Semiconductor Strain Gage Manual, 1985, pp. 4, 8, 9, 40, 41.

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