Nonvolatile MNOS memory

Static information storage and retrieval – Magnetic bubbles – Guide structure

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357 239, 357 2311, 357 41, 357 48, 357 54, 357 59, 365184, H01L 2978, H01L 2702, H01L 2934

Patent

active

046300864

ABSTRACT:
A nonvolatile memory which has both the merits of a floating gate type EEPROM and an MNOS type EEPROM and which can be written into and erased with low voltages is disclosed. Each memory element in the nonvolatile memory has a floating gate, a control gate, a gate insulator film between a semiconductor body and the floating gate, and an inter-layer insulator film between the control gate and the floating gate. The gate insulator film is made up of a very thin SiO.sub.2 film and a thin Si.sub.3 N.sub.4 film formed thereon. The charge centroid of charges injected for storing data lies within the floating gate, not within the Si.sub.3 N.sub.4 film.

REFERENCES:
patent: 3856587 (1974-12-01), Yamazaki et al.
patent: 3878549 (1975-04-01), Yamazaki et al.
patent: 4115914 (1978-09-01), Harari
patent: 4375087 (1983-02-01), Wanlass

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