Nonvolatile memory device and inspection method therefor

Static information storage and retrieval – Floating gate – Particular biasing

Reexamination Certificate

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Details

C365S185090, C365S185220, C365S185200, C365S201000, C365S189090

Reexamination Certificate

active

06249457

ABSTRACT:

BACKGROUND OF THE INVENTION
1. Field of the Invention
This invention relates to a semiconductor nonvolatile memory device such as an EEPROM (Electrically Erasable Programmable Read Only Memory) device or a flash memory device, and a memory inspection method for inspecting a nonvolatile memory device.
2. Description of the Prior Art
Computer systems such as microcomputers are used for various applications at present, and semiconductor nonvolatile memory devices such as an EEPROM and a flash memory are used frequently as information storage media for the computer systems. A nonvolatile memory allows temporary storage of digital data and updating of the stored digital data and can maintain the stored data even when no electric power is supplied.
An example of a nonvolatile memory will be described below with reference to
FIGS. 1 and 2
.
FIG. 1
shows a general structure of an EEPROM which is a kind of nonvolatile memory, and
FIG. 2
shows a memory cell array of the EEPROM.
EEPROM
100
as an example of a nonvolatile memory includes a multiplicity of memory cells
101
arranged in a two-dimensional structure wherein memory cells
101
are connected in a matrix in X and Y directions as a whole as shown in
FIG. 2. A
plurality of X selector transistors
102
and a plurality of Y selector transistors
103
are connected in a matrix to the multiplicity of memory cells
101
. X/Y selector transistors
102
,
103
are provided to select memory cells
101
one by one.
Each memory cell
101
stores and holds respective binary data and assumes a first state in response to write data “1” which is one of the binary data, but assumes a second state in response to erase data “0” which is the other of the binary data. Passing current through memory cell
101
is relatively high write current when memory cell
101
is in the first state, but is relatively low erase current when memory cell
101
is in the second state. The difference between the first and second states is provided, for example, by a difference in threshold voltage of the memory cell which corresponds to the amount of charge injected into the floating gate of the memory cell. The charge injected in the floating gate does not change in an ordinary condition, and this allows memory cells
101
to function as a nonvolatile memory.
EEPROM
100
includes a writing and erasing circuit (not shown) which controls memory cell
101
into the write state (first state) in response to an input of write data “1”, but controls memory cell
101
into the erase state (second state) in response to an input of erase data “0”.
EEPROM
100
further includes sense amplifier
104
, to which memory cells
101
are connected through respective Y selector transistors
103
. Also reference circuit
105
for generating a reference voltage is connected to sense amplifier
104
. Reference circuit
105
includes a plurality of transistors, and sense amplifier
104
includes a plurality of transistors similarly.
Reference circuit
105
includes first transistor
111
to the gate electrode of which external bias power supply
120
is connected. Second transistor
112
is connected in series to first transistor
111
. Second transistor
112
cooperates with third transistor
113
to form first current mirror circuit
121
, and fourth transistor
114
is connected in series to transistor
113
of first current mirror circuit
121
.
Second current mirror circuit
122
is formed from fourth transistor
114
of reference circuit
105
and first transistor
115
of sense amplifier
104
. Second transistor
116
of sense amplifier
104
is connected in series to transistor
115
of second current mirror circuit
122
.
Third current mirror circuit
123
is formed, in sense amplifier
104
, from second transistor
116
and third transistor
117
, and transistor
117
of third current mirror circuit
123
is connected to memory cells
101
through respective Y selector transistors
103
connected in parallel to each other.
Bias power supply
120
supplies a gate voltage to first transistor
111
of reference circuit
105
, and a fixed drain current flows through first transistor
111
. Since first to third current mirror circuits
121
to
123
are successively connected to this first transistor
111
, reference circuit
105
after all supplies reference current corresponding to the drain. current of first transistor
111
to sense amplifier
104
.
Reference circuit
105
generates the reference current as described above. The reference current is higher than erase current which is pass current of memory cell
101
in an erase state, but is lower than write current which is pass current of memory cell
101
in a write state. Sense amplifier
104
compares pass current of memory cell
101
with the reference current of reference circuit
105
and reproduces the binary data stored in memory cell
101
based on a result of the comparison.
EEPROM
100
having the structure described above can execute three operations of data writing, data erasure and data reproduction arbitrarily. In execution of data writing into EEPROM
100
, the writing and erasing circuit selectively controls one of the multiplicity of memory cells
101
to a write state in accordance with input data to record write data “1”, which is one of the binary data, into selected memory cell
101
.
In reproduction of the thus written data, reference circuit
105
generates the reference current, which is higher than the erase current but lower than write current, and sense amplifier
104
compares the pass current of memory cell
101
with the reference current thereby to reproduce binary data “0”, “1”.
In order to erase the written, data described above, the writing and erasing circuit selectively changes the state of memory cell
101
from the write state to the erase state in accordance with input data to initialize the written data “1” of memory cells
101
to the erase data “0”.
While EEPROM
100
can execute the three operations of data writing, data erasure and data reproduction as described above, in order to control memory cell
101
to the write state or the erase state, a predetermined time is required as seen from FIG.
3
.
FIG. 3
is a characteristic diagram illustrating the on-currents upon reading of a memory cell of an EEPROM in a non-used state with respect to the write time and the erase time. The write time signifies a duration of a high voltage pulse applied to a memory cell in order to control the memory cell to the write state, and the erase time signifies a duration of a high voltage pulse applied to a memory cell in order to control the memory cell to the erase state. As apparently seen from
FIG. 3
, in order to obtain prescribed on-currents for the write state and the erase state when data is to be read out from a memory cell, a write time and an erase time longer than a certain time length are required. However, the write time and the erase time required to obtain the prescribed respective on-currents for the write state and the erase state are not constant, but increase as the accumulated number of times by which data writing and erasing operations into and from the EEPROM are performed increases.
FIG. 4
is a characteristic diagram illustrating on-currents upon reading of a memory cell of the EEPROM, whose characteristic has been deteriorated as a result of an endurance test performed for the EEPROM, with respect to the write and erase times. The endurance test signifies a test of rewriting data into a memory cell in order to decide whether the EEPROM is a good product or not.
FIG. 5
illustrates on-currents upon writing/erasure of a memory cell with respect to the number of times of data writing operations in the endurance test.
It is a normal practice to set the write time and the erase time for EEPROM
100
on the assumption that the times required for data writing and data erasure are invariable. Therefore, if the accumulated number of times of data writing operations and data erasing operations increases and memory cells
101
are deteriorated accordingly, then the write

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