Photocopying – Projection printing and copying cameras – Step and repeat
Patent
1992-10-27
1994-03-01
Wintercorn, Richard A.
Photocopying
Projection printing and copying cameras
Step and repeat
355 77, G03B 2742
Patent
active
052912400
ABSTRACT:
This patterning system has the ability to uniformly image a mask onto a substrate having nonlinear exposure characteristics, has large-area exposure capability, and comprises: (a) a stage system capable of synchronously scanning a mask and a substrate in one dimension, and when not scanning in that dimension, capable of moving them laterally in a direction perpendicular to the scan direction so as to position the mask and substrate for another scan partially overlapping the preceding scan, thus exposing the full substrate in an overlapping scan-and-repeat fashion; (b) an illumination system capable of illuminating on the mask a region of a predetermined multisided shape which has at least one of its sides curved, the curvatures of said curved sides being so determined that adjacent scanning exposures are compensated in their overlap regions for the nonlinear response characteristics of the substrate so as to provide uniform cumulative response; (c) a projection assembly capable of imaging the illuminated region on the mask onto the substrate, having the desired imaging resolution, and having an image field size smaller than the substrate; and (d) provision for adjusting the widths of the overlap regions of adjacent scans in such a way that the cumulative response over the entire substrate is uniform.
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Anvik Corporation
Kling Carl C.
Wintercorn Richard A.
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