Nonintrusive modular particle detecting device

Optics: measuring and testing – By particle light scattering – With photocell detection

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356339, 250574, G01N 2100, G01N 2105

Patent

active

054595690

ABSTRACT:
A modular particle detecting device is disclosed for nonintrusive in-situ detection of particles passing through a sensing region. The device is particularly useful for microcontamination control in semiconductor processing environments, and includes, as separate components, a viewing unit and a sensing unit. The viewing unit has a detecting window and heated illuminating and discharge windows for condensation control. A fluid passage connectable to a flow line enables particle-carrying fluid to pass through a sensing region within the passage. The sensing unit has illuminating circuitry for providing light through the illuminating window to the sensing region, and has detecting circuitry to receive, through the detecting window, light scattered at the sensing region to thereby detect particles in fluid then at the sensing region without physical intrusion of the sensing unit into the sensing region. The sensing unit is mounted on the viewing unit when operationally positioned, and is readily removable to allow servicing and/or alternate use without interupting fluid flow through a flow line having the viewing unit connected therewith.

REFERENCES:
patent: Re33213 (1990-05-01), Borden
patent: 4291983 (1981-09-01), Kraft et al.
patent: 4571079 (1986-02-01), Knollenberg
patent: 4673820 (1987-06-01), Kamen
patent: 4798465 (1989-01-01), Knollenberg
patent: 4885473 (1989-12-01), Shotnes et al.
patent: 5033852 (1991-07-01), Zaglio
Knollenberg and Veal, Optical Partical Monitors, Counters and Spectrometers: Performance, Characterization, Comparison and Use; Procedings of the Institute of Environmental Sciences Conference, San Diego, California, 1991, pp. 751-771.

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