Nondestructive optical techniques for simultaneously measuring o

Details Nondestructive optical techniques for simultaneously measuring o Nondestructive optical techniques for simultaneously measuring o

1998-03-18

1999-03-30

Kim, Robert

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356371, 356359, 356360, G01B 902

Patent

active

058895922

ABSTRACT:
An optical technique (apparatus and method based on the use of power spectral density analysis of spectroscopic multiple angle reflection and transmission data is disclosed. The apparatus and methods measure optical constants (n, k) and thicknesses of single and multilayer films. The apparatus and method provide for index determination with high accuracy (0.00001).

REFERENCES:
patent: 4141780 (1979-02-01), Kleinknecht et al.
patent: 4355903 (1982-10-01), Sandercock
patent: 5341211 (1994-08-01), Prinzhausen et al.

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