Nondestructive optical technique for simultaneously...

Optics: measuring and testing – By polarized light examination

Reexamination Certificate

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C356S369000, C356S367000

Reexamination Certificate

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07463355

ABSTRACT:
Optical systems and methods that simultaneously measure optical constants (n, k) and thickness of thin films. The systems and methods use of differential polarimetry (differential analysis of spectroscopic multi-angle reflection and ellipsometric data) to measure optical constants (n k) and thickness of ultra-thin films.

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Cao et al, Simultaneous determination of the optical constants and thickness of very thin films by using soft-x-ray reflectance measurements, Apr. 1994, vol. 33, No. 10.

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