Optics: measuring and testing – By polarized light examination
Reexamination Certificate
2003-06-12
2008-12-09
Lauchman, L. G (Department: 2877)
Optics: measuring and testing
By polarized light examination
C356S369000, C356S367000
Reexamination Certificate
active
07463355
ABSTRACT:
Optical systems and methods that simultaneously measure optical constants (n, k) and thickness of thin films. The systems and methods use of differential polarimetry (differential analysis of spectroscopic multi-angle reflection and ellipsometric data) to measure optical constants (n k) and thickness of ultra-thin films.
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Lauchman L. G
Scientific Computing International
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