Nondestructive noncontact device to characterize semiconductor m

Optics: measuring and testing – By polarized light examination – With polariscopes

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356239, G01N 2121

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active

046377263

ABSTRACT:
A wafer is positioned in a magnetic field. A computer initializes the light level and the electronic gain of each detector preamp associated with a fiber optic link from the analyzer. The magnetic field direction would then be reversed by computer command. This would cause a localized change in intensity of light passing through the wafer, due to Faraday Rotation (FR). The resulting change in detector output together with location and wavelength data could be used to compute a map of the wafer.

REFERENCES:
patent: 4498780 (1985-02-01), Banno et al.
patent: 4559451 (1985-12-01), Curl
Smith, "Nonvisual Measurement of Collapse Field in Small-Bubble Garnets", v. Sci. Instrum., vol. 52, No. 11, pp. 1737-1748, 11/81.

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