Optics: measuring and testing – Inspection of flaws or impurities – Having predetermined light transmission regions
Patent
1992-06-19
1994-04-19
McGraw, Vincent P.
Optics: measuring and testing
Inspection of flaws or impurities
Having predetermined light transmission regions
G01N 2188
Patent
active
053050797
ABSTRACT:
A method for detecting defects in a film structure of a thin film formed on a substrate by projecting a light flux in a direction precisely parallel or nearly parallel to the face of the substrate, separating a reflected light from the thin film and the substrate from a scattered light in a direction precisely perpendicular or nearly perpendicular to the face of the substrate and reading information only of the scattered light.
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Albrecht Otto
Eguchi Ken
Canon Kabushiki Kaisha
McGraw Vincent P.
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