Nondestructive determination of plasma processing treatment char

Details Nondestructive determination of plasma processing treatment char Nondestructive determination of plasma processing treatment char

1994-12-23

1995-10-03

Padgett, Marianne

Coating processes

Measuring, testing, or indicating

427 10, 427525, 427523, 427528, 427569, 20419233, 216 67, B05D 306, C23C 1400, C23C 100

Patent

active

054550610

ABSTRACT:
Plasma processing treatment characteristics of an object are determined nondestructively, prior to plasma processing the object, by placing an indicator layer over at least a portion of the plasma processing surface of the object, so as to generally conform to the shape of the surface. An electrically conductive grid is placed over the indicator layer, and made electrically common with the object. The indicator layer is implanted through the conductive grid, and changes properties responsive to the plasma processing treatment. The implanted indicator layer is thereafter analyzed to determine the treatment characteristics of the indicator layer. Plasma processing spatial distribution and total dosage are determined nondestructively from this information and used to establish the plasma processing program for the object and adjust the plasma processing apparatus as needed.

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