Radiant energy – Electron energy analysis
Reexamination Certificate
2005-05-10
2005-05-10
Lee, John R. (Department: 2881)
Radiant energy
Electron energy analysis
C250S307000, C250S306000, C378S050000
Reexamination Certificate
active
06891158
ABSTRACT:
The present invention provides for characterization of a film (e.g., thickness determination for a silicon oxynitride film) using collected spectral data. For example, an acquired spectrum may be cumulatively integrated and the geometric properties of the integrated spectrum may be used to determine component concentration information. Thickness measurements for the film may be provided based on the component concentration information.
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Larson Paul E.
Watson David G.
Hashmi Zia R.
Lee John R.
ReVera Incorporated
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