Noncontacting conductivity type determination and surface state

Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor

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324158D, G01R 3126

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active

045516740

ABSTRACT:
Disclosed is a capacitive, preferably noncontacting, photovoltaic method for conductivity type determination of a semiconductor sample, including of a thin epitaxial layer on a substrate, and a related method that can advantageously be used for surface state spectroscopy of semiconductors. The type-determination method comprises comparing the phase of a signal, obtained capacitively by maintaining an electrode in close proximity with an appropriately illuminated semiconductor surface region, with the phase of a reference signal at the illumination modulation frequency. The phase relationship between signal and reference signal indicates the conductivity type of the semiconductor. A preferred embodiment of the method, comprising an operational amplifier integrator, can be advantageously used for surface state spectroscopy, since, inter alia, the observed signal is substantially independent of the sample/electrode spacing.

REFERENCES:
patent: 3748579 (1973-07-01), Henry et al.
patent: 3919639 (1975-11-01), Graffe et al.
patent: 4190799 (1980-02-01), Miller
patent: 4286215 (1981-08-01), Miller et al.
patent: 4333051 (1982-06-01), Goodman
Journal of Applied Physics, Stevenson, "Measurement of Carrier Lifetimes in Germanium and Silicon", vol. 26, No. 2, Feb. 1955, pp. 190-195.
Ann. Rev. Mater. Sci., Miller, G. L., et al., "Capacitance Transient Spectroscopy", 1977, pp. 377-448.
Sov. J. Quantum Electron, Burbaev, T. M. et al., "Phase Method for the Determination of the Lifetime of Nonequilibrium Carriers . . . ", vol. 9, No. 10, Oct. 1979, pp. 1293-1296.
The Electrochemical Society Proceedings, Miller, G. L. et al., "Nondestructive Electrical Test Methods . . . ", vol. 78-3, 1978, pp. 1-31.
Proceedings of the 2nd ISPRA Nuclear Electronics Symposium, Miller, G. L. et al., "Transversal Filters for Pulse Spectroscopy", May 1975, pp. 9-19.
Instruments and Experimental Techniques, Kashnikov, B. P., "Cold Thermal Probe", vol. 19, No. 2, Pt. 2, Mar. 1976, p. 575.
Review of Scientific Instruments, Hakansson, H., "Conductivity Type Determination for Different Semiconductor Materials", vol. 43, No. 9, Sep. 1976, pp. 1380-1381.
Solid State Technology, Yeager, J. R., "Semiconductor Resistivity and Conductivity Type Determination", Mar. 1974, pp. 14-16.
Journal of Applied Physics, Goodman, A. M., "A Method for the Measurement of Short Minority Carrier Diffusion Lengths in Semiconductors", vol. 32, No. 12, Dec. 1961, pp. 2550-2552.
1981 Annual Book of ASTM Standards, "Minority Carrier Diffusion Length in Silicon by Measurement of Steady-State Surface Photovoltage", 1981, pp. 795-801.
Physics of Semiconductor Devices, 2nd ed., Sze, S. M., 1981, pp. 750-751.
Rep. Prog. Physics, Blood, P. et al., "The Electrical Characterization of Semiconductors", vol. 41, 1978, pp. 11-252.
Evrenidis, et al., "Detecting Insulator Surface Charge", IBM Technical Disclosure Bulletin, vol. 13, No. 9, Feb. 1971, p. 2797.

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