Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor
Patent
1982-11-12
1985-11-05
Levy, Stewart J.
Electricity: measuring and testing
Measuring, testing, or sensing electricity, per se
With rotor
324158D, G01R 3126
Patent
active
045516740
ABSTRACT:
Disclosed is a capacitive, preferably noncontacting, photovoltaic method for conductivity type determination of a semiconductor sample, including of a thin epitaxial layer on a substrate, and a related method that can advantageously be used for surface state spectroscopy of semiconductors. The type-determination method comprises comparing the phase of a signal, obtained capacitively by maintaining an electrode in close proximity with an appropriately illuminated semiconductor surface region, with the phase of a reference signal at the illumination modulation frequency. The phase relationship between signal and reference signal indicates the conductivity type of the semiconductor. A preferred embodiment of the method, comprising an operational amplifier integrator, can be advantageously used for surface state spectroscopy, since, inter alia, the observed signal is substantially independent of the sample/electrode spacing.
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AT&T Bell Laboratories
Baker Stephen M.
Levy Stewart J.
Pacher Eugen E.
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