Noncontact capacitance measuring device

Details Noncontact capacitance measuring device Noncontact capacitance measuring device

1999-03-19

2000-11-21

Metjahic., Safet

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

324686, 324758, G01R 3126, G01R 2726

Patent

active

061508322

ABSTRACT:
An apparatus for conducting noncontact capacitance versus voltage measurements over a flat surface of a test wafer comprises a capacitance measuring head mounted on a positioning arm. The positioning arm is kinematically mounted and positions the measuring head over the test wafer. The capacitance measuring head has a plurality of electrically separate capacitor plates, one for use in making the capacitance versus voltage measurements and the remaining plates for providing capacitive position signals. Actuators responsive to the position signals place the measuring head very close to and substantially parallel to the surface of the test wafer.

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