Noncentering specimen prealigner

Details Noncentering specimen prealigner Noncentering specimen prealigner

1991-05-17

1994-05-03

Bucci, David A.

Material or article handling

Article reorienting device

Orienter has article gripping means

198394, 414786, 414936, B65G 4724

Patent

active

053082222

ABSTRACT:
A prealigner (10) employs an X-Y stage (20) and a rotary stage (26) to position and orient a specimen (12) without centering it on the prealigner. In a preferred embodiment, the rotary stage is mounted on the X-Y stage and receives a semiconductor (12) in a substantially arbitrary position and orientation. The prealigner employs the rotary stage and translation in only an X-axis direction to scan the peripheral edge (76) of the wafer across an optical scanning assembly (36) to form a polar coordinate map of the wafer. A microprocessor (162) determines the location and orientation of the wafer from the map and cooperates with a motor drive controller (122) to generate control signals for positioning and orienting the wafer in the preselected alignment without changing the location at which the wafer is held.

REFERENCES:
patent: 4457664 (1984-07-01), Judell et al.
patent: 4887904 (1989-12-01), Nakazato et al.
patent: 4938654 (1990-07-01), Schram
patent: 5125791 (1992-06-01), Volovich

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