Non-volatile memory, method of manufacture, and method of...

Static information storage and retrieval – Floating gate – Particular biasing

Reexamination Certificate

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C365S185050

Reexamination Certificate

active

06438030

ABSTRACT:

FIELD OF THE INVENTION
The present invention relates generally to semiconductor devices and, more particularly, to non-volatile memories and isolated channel programming and array operation.
RELATED ART
Conventional memory arrays, such as an electrically erasable programmable read only memory (EEPROM) array, comprise pluralities of individual memory cells. The memory cells can be programmed for desired logic or memory states. In programming the array, each cell must have either a high or low voltage (i.e., on or off) state. The high voltage state that is desirable is limited by power consumption considerations and physical and materials constraints. The low voltage state that is desirable is likewise limited because it must be differentiated from the high voltage state and, yet, it must not result in cross leakage among neighboring cells in tight memory array cell distributions. The higher the voltage required for accessing the low states, the greater the power consumed by the memory cells.
Conventionally, memory cells are distributed in an array. A simplified example of such an array is shown in FIG.
1
. The example array in
FIG. 1
includes only nine individual memory cells, whereas typical memory arrays include many more cells. The small number of cells in the example array of
FIG. 1
is, therefore, to be understood as merely exemplary for purposes of illustration and discussion herein. In practice, the same principles described herein are applicable to memory arrays of widely varying size, including much larger arrays of memory cells.
The array of
FIG. 1
includes individual memory cells, for example, memory cells
101
-
109
. Each cell of the array, such as, for example, cell
101
, is connected with a wordline at its gate, such as wordline (W
1
)
121
connected to cell
101
at its gate. Other cells
102
and
103
, for example, are also connected to the wordline
121
. For reference purposes in
FIG. 1
, the cells
101
,
102
,
103
are distributed within the array in a common “row”. Common wordlines, such as wordlines (W
1
)
121
, (W
1
)
122
, and (W
3
)
123
, connect cells in common rows, such as cells
101
,
102
,
103
, and
104
,
105
,
106
, and
107
,
108
,
109
, respectively.
A drain of each cell of the row is connected to a separate bitline, for example, the drain of cell
101
is connected to bitline (B
1
)
131
. The same bitline
131
connects with other cells
104
and
107
, for example, of the array. For reference purposes, the cells
101
,
104
,
107
are distributed in a common “column” of the array. Common bitlines, such as bitlines
131
,
132
, and
133
, connect cells
101
,
104
,
107
and
102
,
105
,
108
and
103
,
106
,
109
, respectively, in common columns.
A source of the cell
101
is connected to a source line
125
. This source line
125
also connects the source of all other cells
101
-
109
of the entire array. Thus, it can be understood in
FIG. 1
, that respective ones of the parallel wordlines
121
-
123
connect the gate of each of the cells
101
-
103
,
104
-
106
, or
107
-
109
, respectively, distributed in common rows of the array, and whereas respective ones of the parallel bitlines
131
-
133
connect the drain of each of the cells
101
,
104
,
107
, or
102
,
105
,
108
, or
103
,
106
,
109
, respectively, distributed in common columns of the array. All cells
101
-
109
of the array are situated in a common well, for instance, a p-well
100
of FIG.
1
. In this arrangement, each of the source line
125
and the p-well
100
are common to each of the cells
101
-
109
of the array.
In programming the foregoing array of cells
101
-
109
, a positive voltage is applied to selected memory cell wordlines and to the selected memory cells bitlines. The selected memory cells are subsequently programmed via hot carrier injection (HCI) thereby altering the threshold voltage of selected memory cells (i.e. altering the amount of charge stored in their floating gates). The change in threshold voltage is periodically sensed during the programming event to detect whether or not a targeted threshold voltage has been achieved for all selected memory cells in the array. In erasing the foregoing array of cells
101
-
109
, the entire array is erased by applying a negative voltage to each wordline and a positive voltage to either the source line
125
or to the common p-well
100
. In this manner, the floating gates for all memory cells in the array will correspondingly be charged the low threshold voltage state, simultaneously.
Referring to
FIG. 2
, a plot illustrates threshold voltage among bits represented by memory cells
101
-
109
of the array under a high threshold voltage state and low threshold voltage state, i.e., corresponding to “off” or “on” states. It is notable that each of the high voltage state and the low voltage state is actually a range of voltage levels in the vicinity of a particular target high voltage and target low voltage, respectively. The ranges of voltage exhibited in
FIG. 2
are illustrative of the type of distribution which is exhibited on programming of the conventional array in which all cells share a common well, such as p-well
100
. In the distribution of
FIG. 2
, high threshold voltages are concentrated in a relatively narrow distribution between, for example, 5 to 6 volts. However, the threshold voltage distribution will be much broader for the low threshold voltage state, such as 0.5 volts to 2.5 volts. This broader threshold voltage distribution at the lower threshold voltage state results mainly because all memory cells are erased at the same time as a result of the common p-well in which all the bit cells are located. The process variation, materials defects, and degradation of material properties are all major causes of this broader Vt distribution at the lower threshold state in comparison with the higher threshold state. The wider Vt distribution leads to the requirement of high wordline voltage during read operations, to ensure success of read access of the low V
t
state bit cells.
The problems presented include that substantial power is consumed by the requirement of higher wordline voltage to assure achievement of the read access of the low threshold state. Furthermore, to achieve higher wordline voltage, a boost from a low voltage power supply can be required in order to achieve the desired wordline voltage. To reach the desired wordline voltage, even with the boost from the low voltage power supply, can typically require significant amounts of time because of slow boosting if only low power is employed. It would be an advantage to control the voltage range distributions among cell arrays at the lower threshold voltage levels, in order to reduce the required wordline voltage for read access. Controlling the lower voltage range distributions, however, can lead to problems of cross leakage among neighboring cells when all cells of the array are located in a common p-well.
The present invention is a significant improvement and advantage in the art and technology because it provides for limiting lower threshold voltage distributions to a narrower range and further enables faster access by using lower wordline voltage.


REFERENCES:
patent: 5621233 (1997-04-01), Sharma et al.
patent: 5789776 (1998-08-01), Lancaster et al.
patent: 6011287 (2000-01-01), Itoh
patent: 6084262 (2000-06-01), Chi
patent: 6091101 (2000-07-01), Wang

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