Non-subliming Mid-UV dyes and ultra-thin organic arcs having dif

Details Non-subliming Mid-UV dyes and ultra-thin organic arcs having dif Non-subliming Mid-UV dyes and ultra-thin organic arcs having dif

1994-11-09

1997-11-18

Richter, Johann

Organic compounds -- part of the class 532-570 series

Organic compounds

Nitriles

C07C25500

Patent

active

056889879

ABSTRACT:
Mid-UV dyes enabling ultra thin antireflection coatings for multi-layer i-line photoetching are produced from bichalcones; bis-a-cyanoacrylates/bis-cyanoacrylamides; and 1.4 divinylbenzenes. The dyes are nonsubliminal and differentially insoluble in standard photoresist solvents.

REFERENCES:
Wurm et al., CA 73:14620 (1970).
Wurm et al., Arch. Pharm. (Weinheim) (1970), 303(5), pp. 428-434.

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