Non-rubbing gate valve for semiconductor fabrication apparatus

Details Non-rubbing gate valve for semiconductor fabrication apparatus Non-rubbing gate valve for semiconductor fabrication apparatus

2006-09-05

2006-09-05

Bastianelli, John (Department: 3751)

Valves and valve actuation

With means to increase head and seat contact pressure

Separate actuators or actuator motion

C251S204000, C251S229000

Reexamination Certificate

active

07100892

ABSTRACT:
A gate valve includes a valve main body having a gate valve body attached to a valve rod; a movement operation mechanism that moves the valve rod in a direction along an axis of the rod up to a position where the gate valve body stops up a flow passage port used for carrying in and out objects; a rotating motion mechanism for rotating the valve rod, which has been moved to that position, by a predetermined angle; and a horizontal drive gear for moving the valve body in a direction orthogonal to the direction of movement of the valve rod to seal the flow passage port.

REFERENCES:
patent: 1391987 (1921-09-01), Smith Whaley
patent: 3330530 (1967-07-01), Andrae
patent: 4036260 (1977-07-01), Davis et al.
patent: 4044993 (1977-08-01), Wheeler
patent: 4132385 (1979-01-01), DeRouen et al.
patent: 5975492 (1999-11-01), Brenes
patent: 6056267 (2000-05-01), Schneider
patent: 6095741 (2000-08-01), Kroeker et al.
patent: 6390449 (2002-05-01), Ishigaki et al.
patent: 3323459 (2002-06-01), None

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