Non-reactive anti-reflection coating

Details Non-reactive anti-reflection coating Non-reactive anti-reflection coating

1993-06-16

1998-11-10

Speer, Timothy M.

Stock material or miscellaneous articles

Composite

Of silicon containing

428209, 428210, 428450, 428451, 428469, 428472, 4284722, 428701, 428702, B32B 1700

Patent

active

058341250

ABSTRACT:
An anti-reflection coating is provided that has a barrier layer and an anti-reflective layer. The barrier layer stops reactions between the anti-reflective layer and underlying layers or substrates, does not make the anti-reflective layer reflective, and preferably does not react with either the reflective layer or the anti-reflective layer. In particular embodiments, the barrier layer is a thin layer of silicon dioxide SiO.sub.2 or silicon nitride Si.sub.3 N.sub.4, and the anti-reflective layer is titanium-tungsten TiW, titanium nitride TiN, or amorphous silicon.

REFERENCES:
patent: 4857418 (1989-08-01), Schuetz

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