Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate
2006-04-19
2009-11-24
Thompson, Timothy J (Department: 2873)
Optical: systems and elements
Optical modulator
Light wave temporal modulation
C359S290000, C430S321000
Reexamination Certificate
active
07623287
ABSTRACT:
Methods of making MEMS devices including interferometric modulators involve depositing various layers, including stationary layers, movable layers and sacrificial layers, on a substrate. A non-planar surface is formed on one or more layers by flowing an etchant through a permeable layer. In one embodiment the non-planar surface is formed on a sacrificial layer. A movable layer formed over the non-planar surface of the sacrificial layer results in a non-planar interface between the sacrificial and movable layers. Removal of the sacrificial layer results in a released MEMS device having reduced contact area between the movable and stationary layers when the MEMS device is actuated. The reduced contact area results in lower adhesion forces and reduced stiction during actuation of the MEMS device. These methods may be used to manufacture released and unreleased interferometric modulators.
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Kogut Lior
Sasagawa Teruo
Tung Ming-Hau
Knobbe Martens Olson & Bear LLP
Qualcomm Mems Technologies, Inc.
Thompson Timothy J
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