Non-oxidizing electrode arrangement for excimer lamps

Details Non-oxidizing electrode arrangement for excimer lamps Non-oxidizing electrode arrangement for excimer lamps

2005-12-06

2005-12-06

Williams, Joseph (Department: 2879)

Electric lamp or space discharge component or device manufacturi

Process

Electrode making

C445S048000

Reexamination Certificate

active

06971939

ABSTRACT:
A non-oxidizing electrode arrangement for an excimer lamp that is formed by coating an electrode of the lamp with a layer of protective layer that prevents the electrode from oxidizing. The protective layer is preferably transparent and possesses a low permeability for oxygen (e.g., silicon oxide, magnesium fluoride, calcium fluoride). The interior of the excimer lamp is evacuated to a pressure level that is lower than the pressure level surrounding the excimer lamp at any time during the non-oxidizing electrode formation process in order to assist in preventing the excimer lamp from fracturing.

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