Measuring and testing – Instrument proving or calibrating – Roughness or hardness
Reexamination Certificate
2008-01-14
2011-10-18
Noland, Thomas P (Department: 2856)
Measuring and testing
Instrument proving or calibrating
Roughness or hardness
C073S001790, C073S001810, C324S750020, C702S085000, C702S094000, C702S116000, C850S001000, C850S019000
Reexamination Certificate
active
08037736
ABSTRACT:
Determination of non-linearity of a positioning scanner of a measurement tool is disclosed. In one embodiment, a method may include providing a probe of a measurement tool coupled to a positioning scanner; scanning a surface of a first sample with the surface at a first angle relative to the probe to attain a first profile; scanning the surface of the first sample with the surface at a second angle relative to the probe that is different than the first angle to attain a second profile; repeating the scannings to attain a plurality of first profiles and a plurality of second profiles; and determining a non-linearity of the positioning scanner using the different scanning angles to cancel out measurements corresponding to imperfections due to the surface of the sample. The non-linearity may be used to calibrate the positioning scanner.
REFERENCES:
patent: 4257053 (1981-03-01), Gilbreath
patent: 5898106 (1999-04-01), Babcock et al.
patent: 7209242 (2007-04-01), Nakamura et al.
patent: 2003/0231261 (2003-12-01), Bassi et al.
patent: 2004/0165056 (2004-08-01), Allen et al.
patent: 2005/0134143 (2005-06-01), Cannon et al.
patent: 2007/0161890 (2007-07-01), Hariharan et al.
patent: 2007/0177241 (2007-08-01), Keh et al.
patent: 2008/0002197 (2008-01-01), Sun et al.
patent: 2008/0031407 (2008-02-01), Satta et al.
patent: 2008/0074719 (2008-03-01), Han
patent: 2008/0106466 (2008-05-01), Kelley et al.
patent: 227583 (1985-09-01), None
patent: 214863 (1987-03-01), None
patent: 61025118 (1986-02-01), None
patent: 04157302 (1992-05-01), None
patent: 06147821 (1994-05-01), None
patent: 08233836 (1996-09-01), None
patent: 2002040352 (2002-02-01), None
JPO machine translation of previously cited Okui et al. JP 2002-40352 A, JP 2002-40352 A dated Feb. 2002.
Joseph Fu, “In situ testing and calibrating of z-piezo of an atomic force microscope,” Rev. Sci. Instrum., vol. 66, No. 7, Jul. 1995, pp. 3785-3788.
Banke, Jr. George W.
Robert James M.
Strocchia-Rivera Carlos
Canale Anthony J.
Hoffman Warnick LLC
International Business Machines - Corporation
Noland Thomas P
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