Radiant energy – Invisible radiant energy responsive electric signalling – Infrared responsive
Reexamination Certificate
2007-04-06
2008-12-02
Porta, David P. (Department: 2884)
Radiant energy
Invisible radiant energy responsive electric signalling
Infrared responsive
Reexamination Certificate
active
07459687
ABSTRACT:
Methods to infer the density of defects in high κ dielectric films in a non-contact, non-invasive and non-destructive manner. THz radiation is employed to measure the change in electrical conductivity of the films before and after illumination with visible light, where the visible light photoionizes the defects thereby changing the electrical conductivity and changing the transmission (or reflection) of THz radiation from the films. The disclosed techniques can be employed to make measurements as soon as wafers are fabricated. The technology is applicable to wafers of any size.
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Altan Hakan
Federici John Francis
Grebel Haim
Gibson & Dernier LLP
Gibson, Esq. Timothy X.
Kim Kiho
New Jersey Institute of Technology
Porta David P.
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