Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate
2005-02-15
2005-02-15
Toatley, Jr., Gregory J. (Department: 2877)
Optics: measuring and testing
By light interference
For dimensional measurement
C356S515000
Reexamination Certificate
active
06856405
ABSTRACT:
A method and apparatus to linearize the phase shifts produced by the wavelength-varying driving mechanism of an interferometer used in phase shift interferometry for the measurement of multiple reflective surfaces first calibrates a sequence of physical values used as the input to the driving mechanism to produce a known linear or a known constant phase shift increment between any two adjacent interferograms. The calibration process, in essence, involves the determination of the sequence of physical values, such as the voltage change with respect to the time, through the process of iteration. This sequence then is used as an input to the phase shift driving mechanism for ongoing operation of the system, thereby compensating for non-linear characteristics of the system.
REFERENCES:
patent: 4594003 (1986-06-01), Sommargren
patent: 5473434 (1995-12-01), de Groot
patent: 5488477 (1996-01-01), de Groot
patent: 6359692 (2002-03-01), Groot
patent: 6717680 (2004-04-01), Kuchel et al.
patent: 6744522 (2004-06-01), De Groot et al.
patent: 6788422 (2004-09-01), Deck
patent: 20040105097 (2004-06-01), Tang
B Bruning J.H., Herriott D.R., Gallagher J. E. Rosenfeld D.P., Ehite A.D., and Bran Brangaccio D.J., “Digital wavefront measuring interferometer for testing optical surfaces and lenses”, Appl. Opt. 13, 2693-2703(1974).
C.L. Koliopoulos, “Interferometric optical phase measurement techniques,” Ph.D. Fissertation, Optical Sciences Center, Univ. Of Arizona(1981).
K. Kinnstaetter, A. W. Lohmann, J. Schwider, and N. Streibl, “Accuracy of phase shifting interferometry,” Appl. Opt. 27, 5082-5089(1988).
P. de Groot, “Measurement of transparent plates with wavelength-tuned phase-shifting interferometry,” App. Optics, vol. 39, No. 16,2658-2663(2000).
K. Okada, H. Sakuta, T. Ose, and J. Tsujiuchi, “Separate measurements of surface shapes and refractive index inhomogeneity of an optical element using tunable-source phase shifting interferometry,” App. Optics, vol. 29, No. 22, 3280-3285(1990).
K. Freischlad and C.L. Koliopoulos, “Fourier description of digital phase-measuring interferometry,” J. Opt. Soc. Am. A7, 542-551(1990).
S. Tang, “Generalized algorithm for phase shifting interferometry”, SPIE, Denver, Jul. 1996.
G. Lai and T. Yatagai, “Generalized phase-shifting interferometry,” J. Opt. Soc. Am. A8, 822-827(1991).
Connolly Patrick
Phase Shift Technology, Inc.
Ptak LaValle D.
Toatley , Jr. Gregory J.
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