Non-electrification polymeric composite material

Details Non-electrification polymeric composite material Non-electrification polymeric composite material

1985-07-30

1987-05-12

Pertilla, Theodore E.

Compositions

Electrically conductive or emissive compositions

Elemental carbon containing

428327, 524495, 524496, H01B 106

Patent

active

046648461

ABSTRACT:
A non-electrification polymeric composite material composed of 60-95% by weight of a copolymer of perfluoro(alkyl vinyl ether) and tetrafluoroethylene (PFA), 1-10% by weight of electrically conductive carbon, and 5-20% by weight of carbonaceous fiber powder. The weight ratio of the electrically conductive carbon contained in the polymeric composite material to the carbonaceous fiber powder also contained in the material in from 1/9 to 7/4, preferably from 2/8 to 5/5. The polymeric composite material is especially suitable as a semiconductor holder, particularly for semiconductor wafers.

REFERENCES:
patent: 4395362 (1983-07-01), Satoh et al.
Yamamoto et al., "Electrostatic Preventing Type Containing Jig"; Abstract (12,3,83).

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