Non-electrification polymeric composite material

Compositions – Electrically conductive or emissive compositions – Elemental carbon containing

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252512, 252514, 252518, 252520, 428327, H01B 106, B32B 516

Patent

active

051065398

ABSTRACT:
A non-electrification polymeric composite material composed of a tetrafluoroethylene/fluoro(alkyl vinyl ether) copolymer containing 4% by weight or more fluoro(alkyl vinyl ether) and an electrically conductive material.
This non-electrification polymeric composite material is suitably used in a holder for holding a semiconductor substrate, or the like.

REFERENCES:
patent: 4664846 (1987-05-01), Enjo et al.

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