Non-dispersive charged particle energy analyzer

Details Non-dispersive charged particle energy analyzer Non-dispersive charged particle energy analyzer

2006-11-28

2006-11-28

Wells, Nikita (Department: 2881)

Radiant energy

With charged particle beam deflection or focussing

With detector

C250S3960ML, C250S305000, C250S310000, C250S306000

Reexamination Certificate

active

07141800

ABSTRACT:
An electron energy analyzer including a curved electrostatic low-pass reflector and a high-pass electrostatic transmissive filter. The reflector comprises a curved grid, preferably ellipsoidal, and an absorber electrode placed in back of the curved grid with respect to the electron source and biased negatively to the curved grid to act as a reflective low-pass filter and a collimating optics for the reflected beam. The transmissive filter includes first and second flat grids extending across the collimated reflected beam. The second grid on the side of the first grid opposite the curved grid is biased negatively to the first grid and the absorber electrode. A field free region is created by applying the same bias to the curved grid, the first grid, and chamber sidewall sleeve. An electron detector detects all electrons passed by the second grid in an energy band in the overlap of the high-pass and low-pass bands.

REFERENCES:
patent: 3935454 (1976-01-01), Lee
patent: 4546254 (1985-10-01), Yamauchi
patent: 58078361 (1983-05-01), None
patent: 60101852 (1985-06-01), None
patent: 62226554 (1987-10-01), None
patent: 62229750 (1987-10-01), None
Angle Resolved Electron Spectrpmeter With Large Angle Visual Display. Nov. 1979. IBM Technical Disclosure Bulletin, Nov. 1979, US vol. No. 22, pp. 2561-2562.
J. D. Lee, “A nondispersive electron energy analyzer for ESCA”,Rev. Sci. Instrum., vol. 44, No. 7, Jul. 1973, 893-898 pp.
I. Tepermeister et al., “Modeling and construction of a novel electron energy analyzer for rapid x-ray photoelectron spectroscopy spectra acquisition”,Rev. Sci. Instrum., vol. 63, No. 8, Aug. 1992, 3828-3834 pp.

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