Non-destructive semiconductor wafer probing system using laser p

Details Non-destructive semiconductor wafer probing system using laser p Non-destructive semiconductor wafer probing system using laser p

1991-04-26

1992-08-25

Karlsen, Ernest F.

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

324 96, 324158T, G01R 3128, G01R 3126

Patent

active

051422247

ABSTRACT:
Electrical devices are characterized by optically triggering an electrical signal onto the device and then optically sampling the electrical signal waveform on the device.

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