Non-critical phase matching in CLBO to generate sub-213nm...

Details Non-critical phase matching in CLBO to generate sub-213nm... Non-critical phase matching in CLBO to generate sub-213nm...

2006-03-10

2009-12-01

Nguyen, Dung T (Department: 2828)

Coherent light generators

Particular beam control device

Nonlinear device

C372S022000

Reexamination Certificate

active

07627007

ABSTRACT:
A laser illuminator and illumination method for use in an inspection system, such as a semiconductor wafer inspection system or photomask inspection system is provided. The design comprises generating fundamental frequency laser energy at different fundamental wavelengths, such as 998 nm, converting a portion of the fundamental frequency laser energy to 2ndharmonic frequency laser energy, further converting the 2ndharmonic frequency laser energy to 4thharmonic frequency laser energy, and mixing the 4thharmonic frequency laser energy with a portion of the fundamental frequency laser energy to produce laser energy at a sum frequency. Mixing is accomplished by non-critical phase matching in a crystal of Cesium Lithium Borate (CLBO). Alternately, the design may employ shifting a portion of the fundamental frequency laser energy to laser energy at a Raman line and/or mixing the 2ndharmonic frequency laser energy with a portion of the fundamental frequency laser energy to produce 3rdharmonic frequency laser energy.

REFERENCES:
patent: 5742626 (1998-04-01), Mead et al.
patent: 6381255 (2002-04-01), Van Saarloos et al.
patent: 2006/0102066 (2006-05-01), Sasaki et al.

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