Cleaning compositions for solid surfaces – auxiliary compositions – Cleaning compositions or processes of preparing – For cleaning a specific substrate or removing a specific...
Patent
1997-05-05
1998-08-25
McGinty, Douglas J.
Cleaning compositions for solid surfaces, auxiliary compositions
Cleaning compositions or processes of preparing
For cleaning a specific substrate or removing a specific...
510175, 510435, 510505, 510500, 510255, C11D 726, C11D 732, C11D 750
Patent
active
057983232
ABSTRACT:
The present invention is directed to a non-corrosive photoresist stripping and cleaning composition, comprising:
(a) about 5% to about 50% solvent selected from the group consisting of N-methyl-2-pyrrolidinone, N-hydroxyethyl-2-pyrrolidinone, 1,3-dimethyl-2-imidazolidinone, dimethylsulfoxide, N,N-dimethylacetamide, diacetone alcohol, ethylene glycol, propylene glycol and admixtures thereof;
(b) about 10% to about 90% of an alkanolamine selected from the group consisting of diethyleneglycolamine, monoethanolamine, diethanolamine, triethanolamine, 2-(2-aminoethylamino)ethanol, and admixtures thereof;
(c) about 0.1% to about 4% of Formula I: ##STR1## where R.sub.1 -R.sub.4 are individually selected from the group consisting of hydrogen, alkyl groups having 1-4 carbon atoms, alkoxy groups having 1-4 carbon atoms, halogen groups, amino groups, hydroxyl groups, carboxyl groups or combinations thereof; and
(d) about 0.1% to about 40% of water, all percentages by weight of the total stripping and cleaning composition.
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Hansen Gale L.
Honda Kenji
Molin Richard M.
McGinty Douglas J.
Olin Microelectronic Chemicals, Inc.
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