Electricity: measuring and testing – Magnetic – Combined
Patent
1979-05-15
1981-11-24
Strecker, Gerard R.
Electricity: measuring and testing
Magnetic
Combined
324236, G01N 2772, G01R 3312
Patent
active
043027210
ABSTRACT:
An instrument for computing resistivity based upon measurements of thickness and conductance. A conductance transducer is a solenoid in an annular ferrite cup connected to a tank circuit for an eddy current measurement of conductance. Within the center of the annular ferrite cup concentric acoustic wave sending and receiving channels are disposed for making an acoustic pressure wave measurement which is used for a thickness measurement using two gauge heads, spaced on opposite sides of an article to be measured. Each gauge head contains identical conductance and thickness transducers. The thickness measurement is divided by the conductance measurement to derive resistivity.
REFERENCES:
patent: 2640190 (1953-05-01), Rines
patent: 3067387 (1962-12-01), Anderson et al.
patent: 3312893 (1967-04-01), Currin et al.
patent: 3890564 (1975-06-01), Watanabe et al.
Botsco, "Eddy-Sonic Test Method", 2/1968, Materials Evaluation, pp. 21-26.
Poponiak et al., "Detecting Conductivity Type in Semiconductor Analysis", 6/1971, IBM Tech. Disc. Bull., vol. 14, No. 1, p. 100.
Kren George J.
Urbanek Karel
Wheeler William R.
Schneck Thomas
Snow Walter E.
Strecker Gerard R.
Tencor Instruments
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