Non-contacting electro-pneumatic servo for vibration isolation

Details Non-contacting electro-pneumatic servo for vibration isolation Non-contacting electro-pneumatic servo for vibration isolation

1988-03-07

1989-07-25

Wayner, William E.

Motors: expansible chamber type

Working member position feedback to motive fluid control

Electrical input and feedback signal means

248638, F16M 1300, F15B 1316

Patent

active

048502618

ABSTRACT:
A sensing system for a vibration isolation table. A sensor responsive to the position of the tabletop is spaced apart from the tabletop and provides an output corresponding to the position of the tabletop. The output is modified to provide a control signal and a valve responsive to the modified signal controls the flow of air into and out of an air isolator which supports the load.

REFERENCES:
patent: 3952979 (1976-04-01), Hansen
patent: 4328941 (1982-05-01), Phillips et al.
patent: 4477045 (1984-10-01), Karasawa et al.
patent: 4730541 (1988-03-01), Greene

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