Non contacting electro-pneumatic servo for vibration isolation

Details Non contacting electro-pneumatic servo for vibration isolation Non contacting electro-pneumatic servo for vibration isolation

1986-06-03

1988-03-15

Wayner, William E.

Motors: expansible chamber type

Working member position feedback to motive fluid control

Electrical input and feedback signal means

91429, 248550, 248638, F16M 1300, F15B 1316

Patent

active

047305410

ABSTRACT:
A sensing system for a vibration isolation table. A sensor responsive to the position of the tabletop is spaced apart from the tabletop and provides an output corresponding to the position of the tabletop. The output is modified to provide a control signal and a valve responsive to the modified signal controls the flow of air into and out of an air isolator which supports the load.

REFERENCES:
patent: 3295488 (1967-01-01), Hiwsch et al.
patent: 3462115 (1969-08-01), Barker
patent: 3874407 (1975-04-01), Griswold
patent: 4077738 (1978-03-01), Keely et al.
patent: 4204458 (1980-05-01), Kononov et al.
patent: 4262784 (1981-04-01), Sibeud
patent: 4328941 (1982-05-01), Phillips et al.
patent: 4368900 (1983-01-01), Beusse
patent: 4477045 (1984-10-01), Karasawa et al.
patent: 4662605 (1987-05-01), Garcia

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