Radiant energy – Photocells; circuits and apparatus – Optical or pre-photocell system
Patent
1990-06-13
1992-04-14
Nelms, David C.
Radiant energy
Photocells; circuits and apparatus
Optical or pre-photocell system
356386, G01N 2186
Patent
active
051050919
ABSTRACT:
A non-contact type automatic multi-point diameter measurement apparatus for measuring diameters of a single crystal ingot pulled up in a single crystal pulling apparatus, adapted to measure the diameters in a real time manner without physically coming in contact with the single crystal ingot, comprising: a light emitter having a length substantially greater than the general diameter of the single crystal ingot and adapted to shift in the direction of the axis of the single crystal ingot; an optical diameter measurement device looking toward the light emitter across the single crystal ingot, adapted to shift together with the light emitter so as to always look toward the light emitter across the single crystal ingot, located at such a predetermined position relative to the light emitter and the single crystal ingot that at least the light emitted from both ends of the light emitter can reach the optical diameter measurement device without being intercepted by the single crystal ingot, and adapted to optically measure a diameter of the single crystal ingot; a position detection device for detecting whether the optical diameter measurement device is in one of predetermined positions; a control device for actuating the optical diameter measurement device to measure a diameter of the single crystal ingot; and a data processing device for calculating a representative value of the diameter values based on the measurement result diameters.
REFERENCES:
patent: 3724958 (1973-04-01), Callan
patent: 4260260 (1981-04-01), Letort et al.
patent: 4416541 (1983-11-01), Studer
patent: 4657395 (1987-04-01), Schiraishi et al.
patent: 4912337 (1990-03-01), Wilwerding
Igarashi Kazuhiko
Takahashi Masami
Nelms David C.
Shami K.
Shin-Etsu Handotai & Co., Ltd.
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