Non-contact two position microeletronic cantilever switch

Details Non-contact two position microeletronic cantilever switch Non-contact two position microeletronic cantilever switch

1993-07-26

1994-11-22

Scott, J. R.

Electricity: circuit makers and breakers

Capacitive switch

200181, H03K 17975

Patent

active

053671368

ABSTRACT:
A microelectrostatic cantilever switch that has a thin impermeable oxide layer on the surface of a contact pad which is engaged by an unsupported portion of a cantilever beam when the switch is in a closed position. The switch in the open position exhibits a capacitance between the cantilever beam and contact pad of 0.8 Pf and a capacitance of 0.001 to 0.01 Pf in the closed position.

REFERENCES:
patent: 3539705 (1970-11-01), Nathanson et al.
patent: 3681134 (1972-08-01), Nathanson et al.
patent: 3796976 (1974-03-01), Heng et al.
patent: 4922253 (1990-05-01), Nathanson et al.
patent: 5258591 (1993-11-01), Buck
patent: 5268696 (1993-12-01), Buck et al.

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