Non-contact thermal platforms

Details Non-contact thermal platforms Non-contact thermal platforms

2006-09-14

2009-10-13

Robinson, Daniel L (Department: 3742)

Electric resistance heating devices

Heating devices

Continuous flow type fluid heater

C118S725000, C294S064300, C414S147000

Reexamination Certificate

active

07603028

ABSTRACT:
A thermal treatment system comprising at least one apparatus for thermally treating an object, the apparatus comprising: one platform or two substantially opposite platforms, where at least one of the platforms has at least one thermal means for heating or cooling of the object; and at least one of the platforms has fluid-mechanical means for supporting the object without contact. The platform has an active surface comprising at least one of a plurality of basic cells, each basic cell having at least one of a plurality of pressure outlets and at least one of a plurality of fluid-evacuation channels. At least one of the pressure outlets of each basic cell is fluidically connected through a flow restrictor to a high-pressure fluid supply, the pressure outlets providing pressurized fluid for maintaining a fluid-cushion between the object and the active-surface of the platform. The flow restrictor characteristically exhibits fluidic return spring behavior. Each of the evacuation channels has an inlet and outlet, for locally balancing mass flow for the basic cells.

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