Non-contact technique to monitor surface stress

Measuring and testing – Specimen stress or strain – or testing by stress or strain... – By loading of specimen

Reexamination Certificate

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Reexamination Certificate

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06997061

ABSTRACT:
A non-contact method for evaluating stress in a substrate. An impurity is non-uniformly introduced into at least one region of a crystalline substrate. The crystalline substrate is subjected to physical stress. Fluorescence producing energy is directed at the crystalline substrate. A fluorescence produced by the crystalline substrate is measured. The fluorescence is correlated with the stress on the crystalline substrate.

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