Non-contact system for measuring film thickness

Details Non-contact system for measuring film thickness Non-contact system for measuring film thickness

1998-02-24

2000-08-22

Kim, Robert H.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356432T, G01B 902

Patent

active

06108087&

ABSTRACT:
Thickness of a film in a sample may be detected by directing pump laser pulses to the surface of a sample to generate an acoustic pulse in a sample. The acoustic pulse propagates downwards until it reaches an interface between the bottom of the film and a substrate and is reflected back to the top surface of the film as a first echo. A reflection of the first echo propagates downwards and is again reflected back towards the surface as a second echo. Interferometry is used to measure the lapse of time between the first and second echos from which the thickness of the film may be determined.

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Written Opinion mailed Jan. 11, 2000.

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