Non contact substrate chuck

Details Non contact substrate chuck Non contact substrate chuck

2011-08-09

2011-08-09

Gates, Eric A (Department: 3726)

Chucks or sockets

Vacuum

C269S021000, C451S289000

Reexamination Certificate

active

07992877

ABSTRACT:
A chuck for releasably retaining a substrate, where the chuck has a body with a substrate receiving surface disposed in an X-Y coordinate plane and adapted to receive the substrate. The body has gas pressure delivery channels and gas vacuum drawing channels, where the gas pressure delivery channels and gas vacuum drawing channels are mutually exclusive within the body. The substrate receiving surface has gas pressure delivery portions in communication with the gas pressure delivery channels, for delivering a gas pressure against the substrate while the substrate is retained by the chuck, and thereby keeping the substrate from contacting the substrate receiving surface. The substrate receiving surface also has gas vacuum drawing portions in communication with the gas vacuum drawing channels, for drawing a gas vacuum against the substrate while the substrate is retained by the chuck, and thereby retaining the substrate proximate the substrate receiving surface. Retaining means retain the substrate in X-Y directions from sliding off of the substrate receiving surface.

REFERENCES:
patent: 5180000 (1993-01-01), Wagner et al.
patent: 5830277 (1998-11-01), Johnsgard et al.
patent: 6241825 (2001-06-01), Wytman
patent: 6375176 (2002-04-01), Getchel et al.
patent: 6672576 (2004-01-01), Walker
patent: 7091443 (2006-08-01), Watanabe et al.
patent: 7189313 (2007-03-01), Lubomirsky
patent: 7397648 (2008-07-01), Otaka et al.
patent: 7517431 (2009-04-01), Choi et al.
patent: 7603028 (2009-10-01), Yassour et al.
patent: 7643130 (2010-01-01), Yoshitake et al.
patent: 7665717 (2010-02-01), Lenzini
patent: 7728256 (2010-06-01), Jung et al.
patent: 2002/0000198 (2002-01-01), Ishikawa et al.
patent: 2005/0000949 (2005-01-01), Watanabe et al.
patent: 2006/0112880 (2006-06-01), Iwabuchi et al.
patent: 2008/0145190 (2008-06-01), Yassour et al.
patent: 10-2004-0073087 (2004-08-01), None
patent: 2005086588 (2005-09-01), None
patent: WO 2005086588 (2005-09-01), None

Affiliated with

Also associated with

Rating

Non contact substrate chuck does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Non contact substrate chuck, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Non contact substrate chuck will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2729694