Non-contact sensor and method using inductance and laser distanc

Details Non-contact sensor and method using inductance and laser distanc Non-contact sensor and method using inductance and laser distanc

1989-08-29

1994-10-11

Strecker, Gerard R.

Electricity: measuring and testing

Magnetic

With means to create magnetic field to test material

324226, 324230, 356376, 356381, G01B 710, G01B 1106, G01B 1114

Patent

active

053550838

ABSTRACT:
A non-contact thickness measuring sensor is disclosed which determines the thickness of an overlying material on a substrate. The sensor includes two non-contact separation distance measuring devices which may be utilized to measure the distance from the first device to a portion of the interface between the substrate and the overlying material, while the second device determines the distance from the second device to a portion of the surface of the overlying layer. The difference in the measured distances is related to the thickness of the overlying material. In one embodiment, two lasers are used to measure the separation distances. In another embodiment, the two measured distances are coincident. Because of the coincident geometry of these two measurements, the thickness measuring sensor of this embodiment is substantially insensitive to misalignment of the sensor from the normal to the surface of the overlying layer being measured.

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