Measuring and testing – Surface and cutting edge testing – Roughness
Reexamination Certificate
2007-03-27
2007-03-27
Larkin, Daniel S. (Department: 2856)
Measuring and testing
Surface and cutting edge testing
Roughness
Reexamination Certificate
active
10651680
ABSTRACT:
An apparatus capable of tracking a sample surface level in a z direction and oscillating a cantilever at resonant frequency by using a frequency separation scheme in non-contact mode and method thereof. The inventive apparatus includes a sensing unit for sensing a sample surface; a frequency transforming unit for transforming the sensed signal; a frequency combining unit for combining signals; and an actuating unit for actuating the sensing unit.
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Kim Eun Kyoung
Kim Jun Ho
Lee Sung Q
Park Kang Ho
Park Kyi Hwan
Blakely & Sokoloff, Taylor & Zafman
Electronics and Telecommunications Research Institute
Larkin Daniel S.
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