Non-contact resistivity measurement apparatus and method using f

Details Non-contact resistivity measurement apparatus and method using f Non-contact resistivity measurement apparatus and method using f

1995-03-31

1996-10-08

Nguyen, Vinh P.

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

324752, G01R 3128

Patent

active

055635083

ABSTRACT:
Apparatus and method for measuring the resistivity of a material without contacting or damaging the material, using a current and voltage meter connected to a first probe and a second probe. The probes are placed adjacent the material and in spaced relation to the material, a first ultraviolet laser beam having femtosecond pulses is focused onto the first probe such that the first probe emits electrons toward the material, and a second ultraviolet laser beam having femtosecond pulses is focused onto the material such that the material emits electrons toward the second probe. A voltage and a closed current loop are thus created. The current and voltage meter measures the current and voltage to obtain current and voltage readings, and the current and voltage readings are used to determine the resistivity of the material.

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