Non-contact pneumatic transfer for stages with small motion

Details Non-contact pneumatic transfer for stages with small motion Non-contact pneumatic transfer for stages with small motion

2008-05-20

2008-05-20

Kim, Peter B. (Department: 2851)

Photocopying

Projection printing and copying cameras

Detailed holder for photosensitive paper

C355S075000

Reexamination Certificate

active

10937172

ABSTRACT:
Methods and apparatus for enabling a fine stage to be moved using pneumatics such that disturbances associated with a pneumatic transfer system are not transmitted to the fine stage are disclosed. According to one aspect of the present invention, a stage apparatus includes a first stage, a second stage, and a pneumatic transfer system. The pneumatic transfer system includes at least one transfer mechanism and a transfer block. The transfer mechanism is substantially directly coupled be coupled between the first stage and the transfer block, and the first stage provides a flow through the transfer mechanism to the transfer block. The transfer block is arranged to be positioned over a surface of the second stage to provide the flow to the second stage substantially without contacting the second stage.

REFERENCES:
patent: 6603130 (2003-08-01), Bisschops et al.
patent: 2001/0052970 (2001-12-01), Sato
patent: 2005/0024621 (2005-02-01), Korenaga
patent: 2005/0248744 (2005-11-01), Shibazaki

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